Design, Analysis and Experiment of MEMS based Micropump by a Piezoelectric stack actuator for bio-medical Application

In this paper, we present the design, analysis and fabrication of MEMS based silicon micro-needles for insertion of fluid into the dermis and subcutaneous fat layer of human skin. Micro-electromechanical systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and microfluidic devices. In this paper, the design and fabrication of a multimaterial high-performance micropump is presented. The fabrication process using MEMS fabrication techniques comprised of silicon and Pyrex micromachining and bonding. Manufacturing steps such as three small bulk cylindrical piezoelectric material elements that are integrated with micro-fabricated silicon-on-insulator (SOI) and glass micromachined substrates using eutectic bonding and anodic bonding processes were successfully realized and provide a robust and scalable production technique for the micro pump. Exceptional flow rates of 0.1 ml/min with 1 W power consumption based on piezoelectric stack actuation achieved by appropriate design optimization. The analysis forecasts that the resultant stresses due to applied meandering and axial loads are in the safe range below the acquiesce strength of the material.